Picture of ICP etcher - Oxford Inst.
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AVAILABLE
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Responsibles
1st Responsible:
Alan Hydes
2nd Responsible:
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Description
Details
Tool name:
ICP etcher - Oxford Inst.
Area/room:
IIIV Fab-CG06
Category:
Dry etching
Manufacturer:
Oxford Instruments
Model:
Plasmalab 100
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