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 NameTool IdCategoryManufacturerModel
View Metal coater UFC4900350117Thin film depositionTemescalUFC4900
View Acid wet bench 123456Wet process benchesLamarfloPoly
View Anneal furnace 07350014Thermal processesCarboliteTZF 3"
View Asher - Plasmod 02350011Dry etchingMarchPlasmod
View Asher PICO 04350133Dry etchingDienerPICO
View Chemical Mechanical Planarization01Other processesG&P TechnologyPOLI-500
View Develop wet bench1234567Wet process benchesLamarflopoly
View Dielectric coater350098Thin film depositionLeyboldLab600
View Dishwasher12345678Other processesMieleWasher-disinfector G7883
View Electroplating station350034Other processesTyndallvarious
View E-line e-beam lithography system1619208LithographyRAITHE-line Plus
View Ellipsometer350122MetrologyWoolamM2000
View High power Metal coater350134Thin film depositionTemescalFC2000
View ICP etcher - Oxford Inst.350116Dry etchingOxford InstrumentsPlasmalab 100
View ICP etcher - STS350096Dry etchingSTSMultiplex
View Laser Dicer001SawingLASERODM-1 MEL
View Laser Dicer666666Other processesLaseRODxxxx
View Laurell 12" Spinner2496LithographyLaurellWS650HZ-15NPP
View LO wet bench12345Wet process benchesLamarflometal
View Mask aligner MA1006350112LithographySussMA1006
View Mask aligner MA6350127LithographySussMA6
View Mask Aligner MA802705LithographyKarl SussMA8/BA8
View Mask Cleaning bath350132Wet process benchesCustomWet process bench
View MEMS MA6 05LithographySussMA6
View Micro Transfer Printer Tyndall02707Device mountingX-CeleprintMTP 1002
View Microscope Leitz Metallux350045MetrologyLeitzMetallux
View Microscope Nikon Eclipse 150350131MetrologyNikonEclipse 150
View Microscope Nikon Eclipse 150A + BR Elements350119MetrologyNikonEclipse 150A
View Microscope Nikon Optiphot350003MetrologyNikonOptiphot
View Microscope stereo Leitz350030MetrologyLeitzangled
View Microscope stereo Nikon SMZ1500350089MetrologyNikonSMZ1500
View Microscope stereo Olympus SZ60350026MetrologyOlympusSZ60
View Nanospec350106MetrologyNanometrics3000PHX
View OPTICOAT spinner20009LithographyOpticoatSSE
View Oven #1350047Thermal processesHeraeusTBE
View Oven #2350046Thermal processesHeraeusTBE
View Oven #3350049Thermal processesBinderTBE
View Oven #4350048Thermal processesBinderTBE
View Oven #5350031Thermal processesHeraeusTBE
View Oxidation furnace350013Thermal processesCarbolite4"
View Oxidation furnace BioRad350130Thermal processesBioRadna
View Particle counter350125MetrologyMet One3413
View PECVD350097Plasma depositionSTS310
View Rapid Thermal Annealer350113Thermal processesJipelecJetFirst 100
View Scriber350010Other processesSussHR100
View SEM350129MetrologyJeol6490
View Silylation oven350051Thermal processesHeraeusCustom
View Spinner #2350123LithographyLaurellWS-400B-NPP-Lite
View Spinner #3350126LithographyLaurellWS-400B-NPP-Lite
View Sputterer350115Thin film depositionOxford InstrumentsPlasmalab 400
View Substrate thinning station350128Wet process benchesCustomCustom
View Surface profiler Dektak350120MetrologyDektak6M
View X-Celeprint uTP658320 Other processesAerotechPRO165
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