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 NameTool IdCategoryManufacturerModel
View Metal coater UFC4900350117Thin film depositionTemescalUFC4900
View Acid wet bench 123456Wet process benchesLamarfloPoly
View Anneal furnace 07350014Thermal processesCarboliteTZF 3"
View Asher - Plasmod 02350011Dry etchingMarchPlasmod
View Asher PICO 04350133Dry etchingDienerPICO
View Ballroom access #11111Other processesTyndallBallroom #1
View Ballroom access #211111Other processesTyndallBallroom #2
View Ballroom access #3111111Other processesTyndallBallroom #3
View Ballroom access #4111112Other processesTyndallBallroom #4
View Ballroom access #5111113Other processesTyndallBallroom #5
View Ballroom access #6111114Other processesTyndallBallroom #6
View Ballroom access #711115Other processesTyndallBallroom #7
View Ballroom access #811118Other processesTyndallBallroom #8
View Block A Boiler House0004Maintenance ActivityTyndallTyndall
View Block A Gas Room0005Maintenance ActivityTyndallTyndall
View Block A Subfab0001Maintenance ActivityTyndallTyndall
View Block C Cleanroom Manager000091Other processesTyndallTyndall
View Block C DI plant0007Maintenance ActivityTyndallTyndall
View Block C Subfab0003Maintenance ActivityTyndallTyndall
View Chemical Mechanical Planarization01Other processesG&P TechnologyPOLI-500
View Chemical Process Buddy00002Wet process benchesTyndallCG.02
View CO2 Cleaning Bench07Wet process benchesIn houseCCB1
View Develop wet bench1234567Wet process benchesLamarflopoly
View Dielectric coater350098Thin film depositionLeyboldLab600
View Dishwasher12345678Other processesMieleWasher-disinfector G7883
View Ebeam Lab Access 1000011LithographyTyndallTyndall
View Electronics Work Shop0099Maintenance ActivityTyndallTyndall
View Electroplating station350034Other processesTyndallvarious
View E-line e-beam lithography system1619208LithographyRAITHE-line Plus
View Ellipsometer350122MetrologyWoolamM2000
View Evatec Cluster tool14141Thin film depositionEvatecECT1
View EVG Spray Coater431LithographyEVGEVG
View FR Lab0002Maintenance ActivityTyndallTyndall
View Gas & N2 Courtyard0006Maintenance ActivityTyndallTyndall
View High power Metal coater350134Thin film depositionTemescalFC2000
View IIIV Litho Access 1121144LithographyIn houseIIIVL1
View IIIV Litho Access 21555LithographyIn houseIIIVL2
View KOH Etch Bench23323Wet process benchesIn houseKEB1
View Laser Dicer666666Other processesLaseRODxxxx
View Laser Dicer001SawingLASERODM-1 MEL
View Laurell 12" Spinner2496LithographyLaurellWS650HZ-15NPP
View Leskar Sputterer33211Thin film depositionKurt J. LeskerKJLS1
View LO wet bench12345Wet process benchesLamarflometal
View Mask aligner MA1006350112LithographySussMA1006
View Mask aligner MA6350127LithographySussMA6
View Mask Aligner MA802705LithographyKarl SussMA8/BA8
View Mask Cleaning bath350132Wet process benchesCustomWet process bench
View Mask Cleaning Bath123312Wet process benchesIn houseMCB1
View Mask Cleaning Bench12331Wet process benchesIn houseMCB1
View Material Corridor 12222232Other processesIn houseMC1
View Material Corridor 23332Other processesIn houseMC2
View Mechanical Workshop67777Maintenance ActivityTyndallTyndall
View MEMS Cobra Etcher000099Dry etchingOxfordCobra
View MEMS Litho11020LithographyIn houseML1
View MEMS MA6 05LithographySussMA6
View MEMS Nordiko Sputterer1222334Thin film depositionNordikoNS1
View MEMS Oxford Etch223314Dry etchingOxford InstrumentsMOE1
View MEMS PECVD4433221Thin film depositionSPTSMP1
View MEMS SPTS Etch131423Dry etchingSPTSMSE1
View MEMS wet bench010Wet process benchesIn houseW1
View MEMSTAR HF Vapour Etcher21121213Dry etchingMemstarMHFVE1
View Micro Transfer Printer Tyndall02707Device mountingX-CeleprintMTP 1002
View Microscope Leitz Metallux350045MetrologyLeitzMetallux
View Microscope Nikon Eclipse 150350131MetrologyNikonEclipse 150
View Microscope Nikon Eclipse 150A + BR Elements350119MetrologyNikonEclipse 150A
View Microscope Nikon Optiphot350003MetrologyNikonOptiphot
View Microscope stereo Leitz350030MetrologyLeitzangled
View Microscope stereo Nikon SMZ1500350089MetrologyNikonSMZ1500
View Microscope stereo Olympus SZ60350026MetrologyOlympusSZ60
View Nanospec350106MetrologyNanometrics3000PHX
View OPTICOAT spinner20009LithographyOpticoatSSE
View Oven #1350047Thermal processesHeraeusTBE
View Oven #2350046Thermal processesHeraeusTBE
View Oven #3350049Thermal processesBinderTBE
View Oven #4350048Thermal processesBinderTBE
View Oven #5350031Thermal processesHeraeusTBE
View Oxford Cobra ICP etcher12Dry etchingOxford InstrumentsCobra
View Oxidation furnace350013Thermal processesCarbolite4"
View Oxidation furnace BioRad350130Thermal processesBioRadna
View Particle counter350125MetrologyMet One3413
View PEC111Other processesIn houseA1
View PECVD350097Plasma depositionSTS310
View Rapid Thermal Annealer350113Thermal processesJipelecJetFirst 100
View Release Etch Bench0008Wet process benchesIn houseREB1
View Scriber350010Other processesSussHR100
View SEM350129MetrologyJeol6490
View SEM Bay Access 14442Other processesIn houseSBA1
View SEM Bay Access 2555543Other processesIn houseSBA2
View Silicon Fab Access 19999Other processesTyndallTyndall
View Silicon Fab Access 2000098Other processesTyndallTyndall
View Silicon Fab Access 3000097Other processesTyndallTyndall
View Silicon Fab Access 4000096Other processesTyndallTyndall
View Silicon Fab Access 5100000Other processesTyndallTyndall
View Silicon Fab Access 6100001Other processesTyndallTyndall
View Silicon Fab Access 7100002Device mountingTyndallTyndall
View Silylation oven350051Thermal processesHeraeusCustom
View Spinner #2350123LithographyLaurellWS-400B-NPP-Lite
View Spinner #3350126LithographyLaurellWS-400B-NPP-Lite
View SPTS Synapse Etcher11Dry etchingSPTSSynapse
View Sputterer350115Thin film depositionOxford InstrumentsPlasmalab 400
View Sub Fab Block A 1111132Maintenance ActivityTyndallBlock A
View Sub Fab Block A 2112233Device mountingTyndallSFBA2
View Sub Fab Block A 3111222333Maintenance ActivityTyndallSFBA3
View Sub Fab Block A 41122333Maintenance ActivityTyndallSFBA4
View Sub Fab Block C 111122Device mountingTyndall111222
View Sub Fab Block C 21112223Maintenance ActivityTyndallSFBC2
View Sub Fab Block C 3112333Maintenance ActivityTyndallSFBC3
View Sub Fab Block C 41122343Maintenance ActivityTyndallSFBC4
View Substrate thinning station350128Wet process benchesCustomCustom
View Supervised Tool Training00001Tool TrainingTyndallCG.02
View Surface profiler Dektak350120MetrologyDektak6M
View X-Celeprint uTP658320 Other processesAerotechPRO165
View XeF2 Etcher32241Dry etchingIn houseXFE1
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