You can view Tools and Info without logging in. New fab users should apply for access using the membership form.
It is mandatory for users to book and log all jobs that use the following equipment:
- ICP etchers
- Metal coater
- Dielectric coater
- PECVD tool
- Mask aligners
All other equipment can be booked/logged on an optional basis. A booked slot on a tool always has precedence over an unbooked slot.