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 NameTool IdCategoryManufacturerModel
View Metal coater UFC4900350117Thin film depositionTemescalUFC4900
View Acid wet bench 123456Wet process benchesLamarfloPoly
View Anneal furnace 07350014Thermal processesCarboliteTZF 3"
View Asher - Plasmod 02350011Dry etchingMarchPlasmod
View Asher PICO 04350133Dry etchingDienerPICO
View Beamer Software99999Other processesGenisysv1
View Block C DI plant0007Maintenance ActivityTyndallTyndall
View Carbolite GHA 12_450 furnace1105Thermal processesCarboliteGHA 12_450
View Chemical Mechanical Planarization01Other processesG&P TechnologyPOLI-500
View Chemical Process Buddy00002Wet process benchesTyndallCG.02
View Cleanroom garments III V #1000001Other processesTyndallTyndall
View Cleanroom garments III V #2000003Other processesTyndallTyndall
View CO2 Cleaning Bench07Wet process benchesIn houseCCB1
View Develop wet bench1234567Wet process benchesLamarflopoly
View Dielectric coater350098Thin film depositionLeyboldLab600
View Dishwasher12345678Other processesMieleWasher-disinfector G7883
View Electroplating station350034Other processesTyndallvarious
View E-line e-beam lithography system1619208LithographyRAITHE-line Plus
View Elionix Ebeam10002LithographyElionixGL-100
View Ellipsometer350122MetrologyWoolamM2000
View Evatec Cluster tool14141Thin film depositionEvatecECT1
View EVG Spray Coater431LithographyEVGEVG
View High power Metal coater350134Thin film depositionTemescalFC2000
View III-V Tencor P-17 Step height2018010MetrologyTencorP-17
View KOH Etch Bench23323Wet process benchesIn houseKEB1
View Laser Dicer666666Other processesLaseRODxxxx
View Laser Dicer001SawingLASERODM-1 MEL
View Laurell 12" Spinner2496LithographyLaurellWS650HZ-15NPP
View Leskar Sputterer33211Thin film depositionKurt J. LeskerKJLS1
View LO wet bench12345Wet process benchesLamarflometal
View Mask aligner MA6350127LithographySussMA6
View Mask Aligner MA802705LithographyKarl SussMA8/BA8
View Mask Cleaning bath350132Wet process benchesCustomWet process bench
View Mask Cleaning Bath123312Wet process benchesIn houseMCB1
View Mask Cleaning Bench12331Wet process benchesIn houseMCB1
View MEMS Cleanroom garments000002Other processesTyndallTyndall
View MEMS Cobra Etcher000099Dry etchingOxfordCobra
View MEMS Litho11020LithographyIn houseML1
View MEMS MA6 05LithographySussMA6
View MEMS Nordiko Sputterer1222334Thin film depositionNordikoNS1
View MEMS Oxford Etch223314Dry etchingOxford InstrumentsMOE1
View MEMS PECVD4433221Thin film depositionSPTSMP1
View MEMS SPTS Etch131423Dry etchingSPTSMSE1
View MEMS Suit122227Other processesTyndallA1
View MEMS wet bench010Wet process benchesIn houseW1
View MEMSTAR HF Vapour Etcher21121213Dry etchingMemstarMHFVE1
View Micro Transfer Printer Tyndall02707Device mountingX-CeleprintMTP 1002
View Microscope Leitz Metallux350045MetrologyLeitzMetallux
View Microscope Nikon Eclipse 150350131MetrologyNikonEclipse 150
View Microscope Nikon Eclipse 150A + BR Elements350119MetrologyNikonEclipse 150A
View Microscope Nikon Optiphot350003MetrologyNikonOptiphot
View Microscope stereo Leitz350030MetrologyLeitzangled
View Microscope stereo Nikon SMZ1500350089MetrologyNikonSMZ1500
View Microscope stereo Olympus SZ60350026MetrologyOlympusSZ60
View Nanospec350106MetrologyNanometrics3000PHX
View OPTICOAT spinner20009LithographyOpticoatSSE
View Oven #1350047Thermal processesHeraeusTBE
View Oven #2350046Thermal processesHeraeusTBE
View Oven #3350049Thermal processesBinderTBE
View Oven #4350048Thermal processesBinderTBE
View Oven #5350031Thermal processesHeraeusTBE
View Oxford Cobra ICP etcher12Dry etchingOxford InstrumentsCobra
View Oxidation furnace350013Thermal processesCarbolite4"
View Oxidation furnace BioRad350130Thermal processesBioRadna
View Particle counter350125MetrologyMet One3413
View PEC111Other processesIn houseA1
View Promicron Inspection Microscope02740MetrologyPromicron Micro Measuring ImagingLeica INM200
View Rapid Thermal Annealer350113Thermal processesJipelecJetFirst 200
View Release Etch Bench0008Wet process benchesIn houseREB1
View Scriber350010Other processesSussHR100
View SEM350129MetrologyJeol6490
View Sentech PECVD III-V350097Plasma depositionSentechSI 500 D
View Silylation oven350051Thermal processesHeraeusCustom
View Spinner #2350123LithographyLaurellWS-400B-NPP-Lite
View Spinner #3350126LithographyLaurellWS-400B-NPP-Lite
View SPTS Synapse Etcher11Dry etchingSPTSSynapse
View Sputterer350115Thin film depositionOxford InstrumentsPlasmalab 400
View Substrate thinning station350128Wet process benchesCustomCustom
View Supervised Tool Training00001Tool TrainingTyndallCG.02
View Surface profiler Dektak350120MetrologyDektak6M
View Suss Spinner A1234EpitaxySuss MicrotechLABSPIN 8
View Suss Spinner B1235LithographySuss MicrotechLABSPIN 8
View Training Fab: Asher50006Dry etchingPlasmodV1
View Training Fab: E-beam evaporator50003Thin film depositionMoorehouseV1
View Training Fab: Nanospec50008MetrologyFilmetricsNanometrics
View Training Fab: Oven50004Thermal processesVacucellEVO
View Training Fab: PECVD50002Plasma depositionSentechSI 500 D
View Training Fab: Profilometer50007MetrologyTencorP10
View Training Fab: RTA50001Thermal processesMoorehouseV1
View Training Fab: Wetbench50005Wet process benchesCSCV1
View X-Celeprint uTP658320 Other processesAerotechPRO165
View XeF2 Etcher32241Dry etchingIn houseXFE1
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