Picture of Evatec Cluster tool
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Anne-Marie Kelleher
2nd Responsible:
Pat Connolly
Files
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Description
Details
Tool name:
Evatec Cluster tool
Area/room:
[Not defined]
Category:
Thin film deposition
Manufacturer:
Evatec
Model:
ECT1
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Instructors

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Tool Modes
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