Picture of SI:MEMS Lesker Sputterer
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Fei Tong
2nd Responsible:
Margaret Hegarty
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Description

Kurt J. Lesker Sputter

Use ONLY MEMS Tweezers

Details
Tool name:
SI:MEMS Lesker Sputterer
Area/room:
[Not defined]
Category:
Thin film deposition
Manufacturer:
Kurt J. Lesker
Model:
KJLS1
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Instructors

Licensed Users

Tool Modes
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