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MEMSTAR HF Vapour Etcher (21121213)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Alan Lester
2nd Responsible:
Pat Connolly
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Description
Details
Tool name:
MEMSTAR HF Vapour Etcher
Area/room:
[Not defined]
Category:
Dry etching
Manufacturer:
Memstar
Model:
MHFVE1
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