Picture of XeF2 Etcher
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Pat Connolly
2nd Responsible:
Alan Hydes
Files
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Description
Details
Tool name:
XeF2 Etcher
Area/room:
[Not defined]
Category:
Dry etching
Manufacturer:
In house
Model:
XFE1
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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