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III-V Tencor P-17 Step height (2018010)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Carmel Murphy
2nd Responsible:
Dan O'Connell
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Description
Details
Tool name:
III-V Tencor P-17 Step height
Area/room:
IIIV Fab-CG06
Category:
Metrology
Manufacturer:
Tencor
Model:
P-17
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