Picture of Mask aligner MA6
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Dan O'Connell
2nd Responsible:
Pat Connolly
Files
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Description
Details
Tool name:
Mask aligner MA6
Area/room:
IIIV Fab-CG11
Category:
Lithography
Manufacturer:
Suss
Model:
MA6
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Test
Tool Modes
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