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Training Fab: PECVD (50002)

Picture of Training Fab: PECVD

Current status:

DOWN

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Responsibles

1st Responsible:

Iurii Efimenkov

2nd Responsible:

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Description

Sentech ICP PECVD Deposition System in Training Fab

Details

Tool name:

Training Fab: PECVD

Area/room:

[Not defined]

Category:

Plasma deposition

Manufacturer:

Sentech

Model:

SI 500 D

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes

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