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Training Fab: E-beam evaporator (50003)
Current status:
DOWN
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Responsibles
1st Responsible:
Iurii Efimenkov
2nd Responsible:
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Description
E-beam evaporator in training fab
Details
Tool name:
Training Fab: E-beam evaporator
Area/room:
[Not defined]
Category:
Thin film deposition
Manufacturer:
Moorehouse
Model:
V1
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