Picture of SI:MEMS Sentech ICPCVD
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Iurii Efimenkov
2nd Responsible:
Jim Scully
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Description

Si:MEMS Sentech 500D ICPCVD

Use ONLY MEMS Sentech Tweezers

Details
Tool name:
SI:MEMS Sentech ICPCVD
Area/room:
IIIV Fab-CG06
Category:
Plasma deposition
Manufacturer:
Sentech
Model:
500D
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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