Picture of Si Fab: Fiji ALD Chamber A (III-V)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Alan Blake
2nd Responsible:
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Description
Details
Tool name:
Si Fab: Fiji ALD Chamber A (III-V)
Area/room:
Si Fab
Category:
Thin film deposition
Manufacturer:
Veeco
Model:
Fiji
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