Picture of PECVD
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Dan O'Connell
2nd Responsible:
Pat Connolly
Files
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Description
Details
Tool name:
PECVD
Area/room:
IIIV Fab-CG06
Category:
Plasma deposition
Manufacturer:
STS
Model:
310
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Test
Tool Modes
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