Picture of Sentech PECVD III-V
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Lorenz Nedelmann
2nd Responsible:
Pat Connolly
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Description
Details
Tool name:
Sentech PECVD III-V
Area/room:
IIIV Fab-CG06
Category:
Plasma deposition
Manufacturer:
Sentech
Model:
SI 500 D
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