Picture of E-line e-beam lithography system
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Dan O'Connell
2nd Responsible:
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Description
Details
Tool name:
E-line e-beam lithography system
Area/room:
[Not defined]
Category:
Lithography
Manufacturer:
RAITH
Model:
E-line Plus
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Instructors

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