Picture of Chemical Mechanical Planarization
Current status:
AVAILABLE
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Responsibles
1st Responsible:
ANN FOLEY
2nd Responsible:
Richard Davis
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Description
Details
Tool name:
Chemical Mechanical Planarization
Area/room:
IIIV Fab-CG06
Category:
Other processes
Manufacturer:
G&P Technology
Model:
POLI-500
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