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| Metal coater UFC4900 | 350117 | Thin film deposition | Temescal | UFC4900 |
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| SI:MEMS Lesker Sputterer | 33211 | Thin film deposition | Kurt J. Lesker | KJLS1 |
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| SI:MEMS Sentech ICPCVD | 02991 | Plasma deposition | Sentech | 500D |
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| Acid wet bench | 123456 | Wet process benches | Lamarflo | Poly |
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| Anneal furnace 07 | 350014 | Thermal processes | Carbolite | TZF 3" |
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| Asher Diener 04 | 350133 | Dry etching | Diener | Diener PICO |
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| Beamer Software | 99999 | Other processes | Genisys | v1 |
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| Block C DI plant | 0007 | Maintenance Activity | Tyndall | Tyndall |
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| Carbolite GHA 12_450 furnace | 1105 | Thermal processes | Carbolite | GHA 12_450 |
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| Chemical Mechanical Planarization | 01 | Other processes | G&P Technology | POLI-500 |
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| Chemical Process Buddy | 00002 | Wet process benches | Tyndall | CG.02 |
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| Cleanroom garments III V #1 | 000001 | Other processes | Tyndall | Tyndall |
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| Cleanroom garments III V #2 | 000003 | Other processes | Tyndall | Tyndall |
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| CO2 Cleaning Bench | 07 | Wet process benches | In house | CCB1 |
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| Develop wet bench | 1234567 | Wet process benches | Lamarflo | poly |
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| Dielectric coater | 350098 | Thin film deposition | Leybold | Lab600 |
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| Dishwasher | 12345678 | Other processes | Miele | Washer-disinfector G7883 |
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| Electroplating station | 350034 | Other processes | Tyndall | various |
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| E-line e-beam lithography system | 1619208 | Lithography | RAITH | E-line Plus |
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| Elionix Ebeam | 10002 | Lithography | Elionix | GL-100 |
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| Ellipsometer | 350122 | Metrology | Woolam | M2000 |
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| E-spacer vial | 999999 | Lithography | Dummy | Dummy |
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| Evatec Cluster tool | 14141 | Thin film deposition | Evatec | ECT1 |
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| EVG Spray Coater | 431 | Lithography | EVG | EVG |
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| High power Metal coater/Temescal FC2000 | 350134 | Thin film deposition | Temescal | FC2000 |
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| III-V Angstrom PVD Sputter | 350136 | Thin film deposition | Angstrom | Amod |
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| III-V Tencor P-17 Step height | 2018010 | Metrology | Tencor | P-17 |
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| III-V YES Asher | 350135 | Dry etching | YES | G1000 |
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| KOH Etch Bench | 23323 | Wet process benches | In house | KEB1 |
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| Laser Dicer | 001 | Sawing | LASEROD | M-1 MEL |
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| Laser Dicer | 666666 | Other processes | LaseROD | xxxx |
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| Laurell 12" Spinner | 2496 | Lithography | Laurell | WS650HZ-15NPP |
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| LO wet bench | 12345 | Wet process benches | Lamarflo | metal |
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| Mask aligner MA6 | 350127 | Lithography | Suss | MA6 |
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| Mask Aligner MA8 | 02705 | Lithography | Karl Suss | MA8/BA8 |
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| Mask Cleaning bath | 350132 | Wet process benches | Custom | Wet process bench |
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| Mask Cleaning Bath | 123312 | Wet process benches | In house | MCB1 |
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| Mask Cleaning Bench | 12331 | Wet process benches | In house | MCB1 |
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| MEMS Cleanroom garments | 000002 | Other processes | Tyndall | Tyndall |
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| MEMS Cobra Etcher | 000099 | Dry etching | Oxford | Cobra |
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| MEMS Litho | 11020 | Lithography | In house | ML1 |
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| MEMS MA6 | 05 | Lithography | Suss | MA6 |
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| MEMS Nordiko Sputterer | 1222334 | Thin film deposition | Nordiko | NS1 |
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| MEMS Oxford Etch | 223314 | Dry etching | Oxford Instruments | MOE1 |
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| MEMS SPTS Etch | 131423 | Dry etching | SPTS | MSE1 |
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| MEMS Suit | 122227 | Other processes | Tyndall | A1 |
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| MEMS wet bench | 010 | Wet process benches | In house | W1 |
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| MEMSTAR HF Vapour Etcher | 21121213 | Dry etching | Memstar | MHFVE1 |
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| Micro Transfer Printer Tyndall | 02707 | Device mounting | X-Celeprint | MTP 1002 |
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| Microscope Leitz Metallux | 350045 | Metrology | Leitz | Metallux |
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| Microscope Nikon Eclipse 150 | 350131 | Metrology | Nikon | Eclipse 150 |
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| Microscope Nikon Eclipse 150A + BR Elements | 350119 | Metrology | Nikon | Eclipse 150A |
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| Microscope Nikon Optiphot | 350003 | Metrology | Nikon | Optiphot |
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| Microscope stereo Leitz | 350030 | Metrology | Leitz | angled |
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| Microscope stereo Nikon SMZ1500 | 350089 | Metrology | Nikon | SMZ1500 |
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| Microscope stereo Olympus SZ60 | 350026 | Metrology | Olympus | SZ60 |
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| Nanospec | 350106 | Metrology | Nanometrics | 3000PHX |
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| OPTICOAT spinner | 20009 | Lithography | Opticoat | SSE |
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| Oven #1 | 350047 | Thermal processes | Heraeus | TBE |
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| Oven #2 | 350046 | Thermal processes | Heraeus | TBE |
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| Oven #3 | 350049 | Thermal processes | Binder | TBE |
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| Oven #4 | 350048 | Thermal processes | Binder | TBE |
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| Oven #5 | 350031 | Thermal processes | Heraeus | TBE |
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| Oxford Cobra ICP etcher | 12 | Dry etching | Oxford Instruments | Cobra |
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| Oxidation furnace | 350013 | Thermal processes | Carbolite | 4" |
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| Particle counter | 350125 | Metrology | Met One | 3413 |
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| PEC | 111 | Other processes | In house | A1 |
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| Promicron Inspection Microscope | 02740 | Metrology | Promicron Micro Measuring Imaging | Leica INM200 |
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| Rapid Thermal Annealer | 350113 | Thermal processes | Jipelec | JetFirst 200 |
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| Release Etch Bench | 0008 | Wet process benches | In house | REB1 |
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| Scriber | 350010 | Other processes | Suss | HR100 |
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| SEM | 350129 | Metrology | Jeol | 6490 |
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| Sentech ICPCVD III-V | 350097 | Plasma deposition | Sentech | SI 500 D |
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| Silylation oven | 350051 | Thermal processes | Heraeus | Custom |
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| Spinner #2 | 350123 | Lithography | Laurell | WS-400B-NPP-Lite |
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| Spinner #3 | 350126 | Lithography | Laurell | WS-400B-NPP-Lite |
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| SPTS Synapse Etcher | 11 | Dry etching | SPTS | Synapse |
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| Sputterer | 350115 | Thin film deposition | Oxford Instruments | Plasmalab 400 |
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| Substrate thinning station | 350128 | Wet process benches | Custom | Custom |
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| Supervised Tool Training | 00001 | Tool Training | Tyndall | CG.02 |
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| Surface profiler Dektak | 350120 | Metrology | Dektak | 6M |
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| Suss Spinner A | 1234 | Epitaxy | Suss Microtech | LABSPIN 8 |
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| Suss Spinner B | 1235 | Lithography | Suss Microtech | LABSPIN 8 |
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| Training Fab: Asher | 50006 | Dry etching | Plasmod | V1 |
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| Training Fab: E-beam evaporator | 50003 | Thin film deposition | Moorehouse | V1 |
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| Training Fab: ICP-CVD | 50002 | Plasma deposition | Sentech | SI 500 D |
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| Training Fab: Nanospec | 50008 | Metrology | Filmetrics | Nanometrics |
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| Training Fab: Oven | 50004 | Thermal processes | Vacucell | EVO |
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| Training Fab: Profilometer | 50007 | Metrology | Tencor | P10 |
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| Training Fab: RTA | 50001 | Thermal processes | Moorehouse | V1 |
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| Training Fab: Wetbench | 50005 | Wet process benches | CSC | V1 |
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| X-Celeprint uTP | 658320 | Other processes | Aerotech | PRO165 |
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| XeF2 Etcher | 32241 | Dry etching | In house | XFE1 |